Tình trạng Tuyệt vời ( đang sử dụng)
X : 300 mm
Y : 200 mm
Z : 200 mm
Measuring accuracy - E1X/Y axes (1.5+3L / 1000) μm
E1Z axis PRO and PRO3: (1.5+4L / 1000) μm PRO2:
(4+5L / 1000) μm
- E2X-Y plane PRO and PRO3: (2+4L / 1000) μm
PRO2: (2.5+4L / 1000) μm
LAF repeatability*2 S: 0.4μ
1 Stage glass size 15.71"x10.67"(399 × 271mm)
Maximum stage loading 44lbs.(20kg)
Dimensions of main unit 33.82"x37.44"x63.35"(859×951×1609)
Mass of main unit (including mounting stand) 794lbs.(360kg