Wafer Handlermechatronic Packing Tool

개요

효율적인 웨이퍼 물류 시스템

메카트로닉의 mPT(mechatronic Packing Tool)시리즈는 최신형 기술의 웨이퍼 패커로서 초박막 또는 휜(Warped) 웨이퍼를 안전하게 취급하는 새로운 표준입니다. 또한 모듈식 설계 개념을 일관되게 구현함으로써 오픈 카세트, FOUP, FOSB를 포함한 다양한 웨이퍼 캐리어와 Shipping Box 간의 완벽한 호환성을 보장합니다. 정교한 센서 기술로 다양한 포장재의 유형을 신뢰성 있게 감지할 수 있습니다.

특징

Packing/Unpacking

mPT 150/200 는 비 접촉식 엔드이펙터를 사용하여 150/200 mm (6”/8") 웨이퍼를 포장/포장해제 할 수 있도록 설계되었습니다.

mPT 200/300f 는 진공 엔드이펙터를 사용하여 200/300 mm (8"/12") 프레임의 웨이퍼를 포장/포장해제 할 수 있도록 설계되었습니다.

mPT 200/300 는 베르누이(Bernoulli)엔드이펙터를 사용하여 200/300 mm (8"/12”) 웨이퍼를 포장/포장해제 할 수 있도록 설계되었습니다.

mPT 200/300 neo 는 베르누이(Bernoulli)엔드이펙터를 사용하여 200/300 mm (8"/12”) 웨이퍼를 포장/포장해제 할 수 있도록 설계되었습니다.

스펙

mPT 150/200:

Wafer sizes: 150 mm (6”) and 200 mm (8”)
handling of standard, thin, warped, eWLB, wafer with support ring and MEMS wafers
highest level of reliability and availability
optimized footprint
5 stations for shipping boxes and packing material
automatic End Effector changing station
two cassette stations
mapping sensor
pre-aligner for 6" and 8"
SECS/GEM interface
CE certificated
SEMI standard compliant

mPT 200/300f:

Wafer size: 200mm (8") and 300 mm (12”) on frame
handling of wafers on frame
highest level of reliability and availability
two 6 axle robots for optimized footprint
up to 8 stations for shipping boxes and packing material
automatic End Effector changing station
two stations for frame cassettes
SECS/GEM interface
CE certificated
SEMI standard compliant

mPT 200/300:

Wafer size: 200mm (8") and 300 mm (12”)
handling of standard, thin, warped, eWLB, wafer with support ring and MEMS wafers
highest level of reliability and availability
two 6 axle robots for optimized footprint
up to 8 stations for shipping boxes and packing material
automatic End Effector changing station
two load-ports
mapping sensor
pre-aligner for 8" and 12"
SECS/GEM interface
CE certificated
SEMI standard compliant

mPT 200/300 neo:

Wafer size: 200mm (8") and 300 mm (12”)
handling of standard, thin, warped, eWLB, wafer with support ring and MEMS wafers
optimized foodprint
high troughput
highest level of reliability and availability
dual arm 3 axis robot
station for shipping boxes
two stations for packing material
one station for recycling material
GUI/Operator interface with touchscreen
two load-ports
pre-aligner for 8" and 12"
CE certificated
SEMI standard compliant